The Institute of NANO Testing

Invited Talk

・Hiroshi Akahori, Rapidus Co., Ltd.

　"Rapidus' Challenge and the Inspection and Measurement Technology that Supports It (tentative title)"

・Tetsuo Kodera, Institute of Science Tokyo

　"Fundamentals and Trends of Semiconductor Quantum Bit Research (tentative title)"　

・Tomoaki Hiruta, Hitachi, Ltd.

　"Generative AI-assisted knowledge building for equipment and maintenance, and developing maintenance applications (tentative title)"

Tutorial

・Yongzhao Yao, Mie University

　"Visualization Technology for Lattice Defects Distributed over the Entire Surface of a Semiconductor Wafer"